Sintered composite oxide, manufacturing method therefor, sputtering target, transparent conductive oxide film, and manufacturing method therefor

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United States of America Patent

PATENT NO 9111663
APP PUB NO 20130181173A1
SERIAL NO

13876080

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Abstract

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A sintered composite oxide 2 composed mainly of zinc, aluminum, titanium and oxygen, the atomic ratio of the elements satisfying the following equations (1) to (3), the sintered composite oxide 2 comprising particles having a hexagonal wurtzite structure containing zinc oxide as the major component and having a mean particle size of no greater than 20 μm, and particles having a ZnTiO3-like structure and/or Zn2Ti3O8-like structure containing aluminum and titanium and having a mean particle size of no greater than 5 μm, and containing no particles with a spinel oxide structure of zinc aluminate with zinc and aluminum in solid solution, and a manufacturing method for the same.

description='In-line Formulae' end='lead'(Al+Ti)/(Zn+Al+Ti)=0.004-0.055  (1)description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'Al/(Zn+Al+Ti)=0.002-0.025  (2)description='In-line Formulae' end='tail'

description='In-line Formulae' end='lead'Ti/(Zn+Al+Ti)=0.002-0.048  (3)description='In-line Formulae' end='tail'

[In the equations, Al, Ti and Zn represent the contents (atomic percents) of aluminum, titanium and zinc, respectively.]

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Patent Owner(s)

Patent OwnerAddress
TOSOH CORPORATIONSHUNAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iigusa, Hitoshi Ayase, JP 8 25
Kuramochi, Hideto Ayase, JP 26 131
Shibutami, Tetsuo Ayase, JP 15 115

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