Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 18, 2015
Grant Date -
Dec 5, 2013
app pub date -
May 29, 2013
filing date -
Jun 4, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference φr(=φ2−φ1) between two detected voltages v1 (phase angle: φ1) and v2 (phase angle: φ2). The phase difference computation unit uses a sine wave vs and a cosine wave vc generated separately and having the same frequency as the fundamental frequency of the voltages v1 and v2, to perform computation of v2s=v2×vs, v2c=v2×vc, v1s=v1×vs, v1c=v1×vc, and then extracts DC components I2=(−A2/2)·sin(φ2), R2=(A2/2)·cos(φ2), I1=(−A1/2)·sin(φ1), R1=(A1/2)·cos(φ1) at low-pass filters. The phase difference computation unit computes R3=R1×R2+I1×I2 at a complex multiplying unit to obtain R3=(A1·A2/4)·cos(φr), computes I3=R2×I1−R1×I2 to obtain I3=(A1·A2/4)·sin(φr), and computes φr=tan−1(I3/R3) at the arctangent calculation unit, thereby obtaining the phase difference φr.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully