Endpoint determination for capillary-assisted flow control
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United States of America Patent
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Aug 18, 2015
Grant Date -
May 23, 2013
app pub date -
Jun 18, 2011
filing date -
Jun 18, 2010
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Abstract
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.
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