X-ray imaging apparatus and wavefront measuring apparatus
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United States of America Patent
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Aug 18, 2015
Grant Date -
Nov 8, 2012
app pub date -
Jan 21, 2011
filing date -
Jan 28, 2010
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Abstract
There is provided an X-ray imaging apparatus which images a specimen. The X-ray imaging apparatus comprises: an X-ray source; a diffraction grating configured to diffract an X-ray from the X-ray source; an X-ray detector configured to detect the X-ray diffracted by the diffraction grating; and a calculator configured to calculate phase information of the specimen on the basis of an intensity distribution of the X-ray detected by the X-ray detector, wherein the calculator obtains a spatial frequency spectrum from the plural intensity distributions, and calculates the phase information from the obtained spatial frequency spectrum.
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