Acoustic wave device including a surface wave filter and a bulk wave filter, and method for making same
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United States of America Patent
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Aug 11, 2015
Grant Date -
Aug 16, 2012
app pub date -
Oct 4, 2010
filing date -
Oct 9, 2009
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Abstract
An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
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