Plasma processing method and plasma processing apparatus

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United States of America Patent

PATENT NO 9105451
APP PUB NO 20120181252A1
SERIAL NO

13009278

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Abstract

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A plasma processing apparatus performs generating plasma only with the carrier gas without the supply of the processing gas after the end of processing to the substrate.

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Patent Owner(s)

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SUMITOMO HEAVY INDUSTRIES LTDTOKYO 141-6025

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Makino, Hiroyuki Kanagawa, JP 47 554
Tanaka, Masaru Kanagawa, JP 175 2217

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