Tunable resistance coatings
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United States of America Patent
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Aug 11, 2015
Grant Date -
Oct 24, 2013
app pub date -
Mar 14, 2013
filing date -
Jan 21, 2011
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Abstract
A method and article of manufacture of intermixed tunable resistance composite materials containing at least one of W:Al2O3, Mo:Al2O3 or M:Al2O3 where M is a conducting compound containing either W or Mo. A conducting material and an insulating material are deposited by such methods as ALD or CVD to construct composites with intermixed materials which do not have structure or properties like their bulk counterparts.
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