Micromechanical sensor with multiple spring bars
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United States of America Patent
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Aug 11, 2015
Grant Date -
Feb 23, 2012
app pub date -
Apr 27, 2010
filing date -
Apr 28, 2009
priority date (Note) -
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Abstract
A micromechanical sensor comprising a substrate (5) and at least one mass (6) which is situated on the substrate (5) and which moves relative to the substrate (5) is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass (6) and the substrate (5) and/or two masses which move toward one another are connected by at least one bending spring device (1) for a relative rotational motion. The bending spring device (1) has multiple, in particular two, spring bars (2) extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander (3) on at least one, preferably on all, of the spring bars (2).
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