TEM-lamella, process for its manufacture, and apparatus for executing the process

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United States of America Patent

PATENT NO 9103753
APP PUB NO 20120189813A1
SERIAL NO

13193578

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Abstract

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A process for manufacturing a TEM-lamella includes mounting (51) a plate shaped substrate having a thickness in a support, manufacturing (53) a first, strip-shaped recess on a first side of the substrate under a first angle to the support by means of a particle beam, and manufacturing (55) a second strip-shaped recess on a second side of the substrate under a second angle to the support by means of a particle beam, such that the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region of lesser thickness. The lamella has a thicker rim region and a thinner central region, with a first strip-shaped, recess on a first side of the lamella and a second strip-shaped recess on a second side of the lamella, wherein the first and the second strip-shaped recess mutually form an acute or right angle, and between them form an overlap region having a thickness of below 100 nm. An apparatus for executing the process or manufacturing the lamella includes a lamella support pivotable about a transverse axis and a longitudinal axis inclined, to the vertical direction, a device for rotating about the longitudinal axis, and stop means for limiting a tilt of the lamella support about the transverse axis.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBHANALYTIK JENA JENA THURINGIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biskupek, Johannes Ulm, DE 1 3
Kaiser, Ute Ulm, DE 1 3
Lechner, Lorenz Ulm, DE 12 27

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