Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus
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United States of America Patent
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Aug 11, 2015
Grant Date -
Apr 4, 2013
app pub date -
Sep 6, 2012
filing date -
Sep 29, 2011
priority date (Note) -
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Abstract
A sensor element includes a base part 21, drive vibration arms 221 and 222, adjustment vibration arms 241-244 that vibrate in response to drive vibration of the drive vibration arms 221 and 222, detection electrodes that output a charge according to a physical quantity applied to the drive vibration arms 221 and 222, first adjustment electrodes provided on the adjustment vibration arms 241 and 242 and electrically connected to the detection electrodes for outputting a charge in response to vibration of the adjustment vibration arms 241 and 242, and second adjustment electrodes provided on the adjustment vibration arms 243 and 244 and electrically connected to the detection electrodes for outputting a charge in a reverse polarity with respect to the first adjustment electrodes in response to vibration of the adjustment vibration arms 243 and 244.
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