Method of fabricating nanotips with controlled profile
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United States of America Patent
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Aug 11, 2015
Issued Date -
N/A
app pub date -
Sep 26, 2012
filing date -
Sep 26, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A nanotip, is fabricated by modifying a precursor nanotip having an apex and a shank by applying an electric field in the presence of a reactive gas to perform field-assisted etching wherein atoms are preferentially removed from the shank by chemical interaction with the reactive gas, and controlling the reactive gas pressure and/or tip voltage to vary the electric field so as to promote field evaporation of apex atoms during fabrication of the nanotip and thereby control the overall profile of the resulting nano-tip. The method permits shaping of the overall tip profile.
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International Classification(s)
- 2012 Application Filing Year
- B82Y Class
- 2307 Applications Filed
- 1243 Patents Issued To-Date
- 53.88 % Issued To-Date
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- 0 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 10 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 11, 2027 |
