Circuit for measuring the resonant frequency of nanoresonators
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United States of America Patent
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Aug 4, 2015
Grant Date -
Oct 23, 2014
app pub date -
Apr 15, 2014
filing date -
Apr 17, 2013
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Abstract
In the field of nanoresonator oscillators or NEMS (nanoelectromechanical systems) oscillators, a circuit is proposed for measuring the oscillation frequency of a resonator, including a phase-locked loop with a frequency-controlled oscillator and a phase comparator. The resonator includes a vibration excitation input and a dynamic polarization input (using strain gauges). The frequency-controlled oscillator applies a polarization frequency f1 to the polarization input. A frequency generator supplies a fixed intermediate frequency FI; a mixer receives the frequencies f1 and FI for producing an excitation frequency f0 that is the sum or difference of f1 and FI. The phase comparator receives the frequency FI and the output signal of the resonator and produces a control signal that is sent to the frequency-controlled oscillator, indirectly locking the oscillation frequency onto the resonant frequency of the resonator.
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