Adaptive optics for compensating aberrations in light-sustained plasma cells

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United States of America Patent

PATENT NO 9097577
APP PUB NO 20130003384A1
SERIAL NO

13529582

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Abstract

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A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Sunnyvale, US 73 532
Derstine, Matthew Los Gatos, US 29 281
Shchemelinin, Anatoly Pleasanton, US 52 507
Zhao, Yanming Milpitas, US 11 43

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