Apparatus for manufacturing thin film photovoltaic devices
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United States of America Patent
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Aug 4, 2015
Grant Date -
Jan 5, 2012
app pub date -
Jul 18, 2011
filing date -
Mar 29, 2010
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Abstract
An apparatus for fabricating thin film photovoltaic devices includes a deposition chamber for loading a pair of substrates. Two heater platens in a side-by-side configuration with a middle gap form intimate contact with the pair of substrates. Each heater platen has a second width and a second length respectively made smaller than the first width and the first length to allow the substrate to fully cover the heater platen for preventing formation of edge lip due to coating buildup in a peripheral edge region. The apparatus further includes a shield structure which covers both the middle gap and all outer peripheral side regions of the side-by-side configuration of the two heater platens for preventing coating buildup and guiding a downstream flow.
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