System and method for high-speed atomic force microscopy with switching between two feedback loops
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United States of America Patent
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Jul 28, 2015
Grant Date -
Nov 21, 2013
app pub date -
May 1, 2013
filing date -
Apr 9, 2010
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Abstract
A high-speed atomic force microscope (HSAFM) is disclosed herein. The HSAFM includes a cantilever, a piezotube, an optical detector, a circuit element, and a feedback controller. The cantilever has a probe, and the piezotube is arranged in proximity to the probe. The optical detector is configured to detect deflection of the cantilever, and the circuit element is abutting a first end of the cantilever and is configured to exert a force on the cantilever to resist deflection of the cantilever. The circuit element is communicably connected to the optical detector by a first feedback loop. The feedback controller is communicably connected to the piezotube and configured to modulate the piezotube along the Z-axis towards and away from the probe. And the feedback controller is communicably connected to the optical detector through a second feedback loop.
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