High throughput imprint based on contact line motion tracking control

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United States of America Patent

PATENT NO 9090014
APP PUB NO 20150140149A1
SERIAL NO

14604822

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Abstract

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Systems for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A388 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lu, Xiaoming Cedar Park, US 29 193
Schumaker, Philip D Austin, US 34 613

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