Display element manufacturing method and manufacturing apparatus

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United States of America Patent

PATENT NO 9086585
SERIAL NO

12978976

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Abstract

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The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.

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Patent Owner(s)

  • NIKON CORPORATION

International Classification(s)

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  • 2010 Application Filing Year
  • H01L Class
  • 16510 Applications Filed
  • 13147 Patents Issued To-Date
  • 79.64 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20102011201220132014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamada, Tomohide Yokohama, JP 42 725
Nara, Kei Yokohama, JP 46 461

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  • 59 Citation Count
  • H01L Class
  • 95.84 % this patent is cited more than
  • 10 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1377800619237183722181459473474314501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +05001000150020002500300035004000450050005500600065007000750080008500

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11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 21, 2027