Display element manufacturing method and manufacturing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Jul 21, 2015
Issued Date -
N/A
app pub date -
Dec 27, 2010
filing date -
Jun 26, 2008
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- NIKON CORPORATION
International Classification(s)

- 2010 Application Filing Year
- H01L Class
- 16510 Applications Filed
- 13147 Patents Issued To-Date
- 79.64 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Hamada, Tomohide | Yokohama, JP | 42 | 725 |
# of filed Patents : 42 Total Citations : 725 | |||
Nara, Kei | Yokohama, JP | 46 | 461 |
# of filed Patents : 46 Total Citations : 461 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 59 Citation Count
- H01L Class
- 95.84 % this patent is cited more than
- 10 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 21, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Legal Events
Date | Code | Event | Description |
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Mar 29, 2005 | FPAY | FEE PAYMENT | year of fee payment: 12 |
Apr 05, 2001 | FPAY | FEE PAYMENT | year of fee payment: 8 |
Apr 15, 1997 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Dec 05, 1993 | FEPP | FEE PAYMENT PROCEDURE | free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Oct 26, 1993 | I | Issuance | |
Oct 15, 1993 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
Apr 03, 1991 | F | Filing | |
Mar 27, 1991 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:MASUTANI, TETSUYA;MAEDA, MASAHIKO;YANAGISAWA, NORIO;AND OTHERS;REEL/FRAME:005688/0611 Owner name: DAIKIN INDUSTRIES LTD., UMEDA CENTER BUILDING, 4- Effective Date: Mar 27, 1991 |
Apr 07, 1990 | PD | Priority Date |

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