Functional device, method of manufacturing the functional device, physical quantity sensor, and electronic apparatus
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United States of America Patent
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Jul 21, 2015
Grant Date -
May 10, 2012
app pub date -
Oct 20, 2011
filing date -
Nov 4, 2010
priority date (Note) -
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Abstract
A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.
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