Apparatus and method for generating separating fissures in a substrate
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United States of America Patent
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Jul 21, 2015
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app pub date -
Apr 10, 2013
filing date -
Apr 12, 2012
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Abstract
The invention is directed to an apparatus and a method for generating separating fissures in a substrate through action of a laser beam having an elliptical beam cross section with a beam spot length in a movement direction along a separating fissure to be generated in the substrate. The apparatus and method are particularly suitable for separating fissures which start or end on the substrate surface. A suitable diaphragm prevents radiation from impinging on the substrate before the start and after the end of the fissure.
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