Leveling apparatus and atomic force microscope including the same

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Jul 14, 2015
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Oct 9, 2014
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Apr 2, 2014
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Apr 3, 2013

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Abstract

The present invention relates to a leveling apparatus that levels an object to be leveled with a surface of a substrate by measuring the force applied to the object, and an atomic force microscope including the leveling apparatus.

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Patent Owner	Address
PARK SYSTEMS CORP	KANC 4TH FLOOR 109 GWANGGYO-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16229

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Inventor Name	Address	# of filed Patents	Total Citations
Jo, Ah Jin	Seoul, KR	3	2
Kim, Suk Hyun	Seoul, KR	1	2
Noh, Han Aul	Suwon-Si, KR	2	2

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Leveling apparatus and atomic force microscope including the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14243728

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PATENT NO	9081272
APP PUB NO	20140304861A1
SERIAL NO	14243728
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
July 14, 2015	US,9081272,B2 US9081272B2	GRANTED PATENT AS SECOND PUBLICATION
October 09, 2014	US,20140304861,A1 US20140304861A1	FIRST PUBLISHED PATENT APPLICATION

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14243728

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