Scanning probe microscope with improved feature location capabilities
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United States of America Patent
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Jul 14, 2015
Grant Date -
Mar 19, 2015
app pub date -
Mar 19, 2013
filing date -
Mar 19, 2012
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Abstract
An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.
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