Microelectromechanical system (MEMS) resonant switches and applications for power converters and amplifiers

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United States of America Patent

PATENT NO 9077060
APP PUB NO 20110067984A1
SERIAL NO

12878237

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Abstract

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A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or “resoswitch”, with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower.

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Patent Owner(s)

Patent OwnerAddress
REGENTS OF THE UNIVERSITY OF CALIFORNIA THE A CALIFORNIA CORPORATION1111 FRANKLIN STREET 12TH FLOOR OAKLAND CA 94607-5200

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Bongsang Albuquerque, US 30 236
Li, Wei-Chang Berkeley, US 3 7
Lin, Yang Albany, US 65 850
Nguyen, Clark Tu-Cuong Oakland, US 6 290

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