Micromachined structures
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United States of America Patent
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Jun 30, 2015
Grant Date -
May 3, 2012
app pub date -
Jan 4, 2012
filing date -
Oct 23, 2007
priority date (Note) -
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Abstract
A micromachined structure includes a substrate and a suspended structure. The substrate has a cavity formed thereon. The suspended structure is formed on the cavity of the substrate. The suspended structure includes a first metal layer, a second metal layer, and a first dielectric layer positioned between the first and second metal layers, wherein the first dielectric layer has a first opening in communication with the cavity through an opening formed in the first metal layer.
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