Multiple frequency atomic force microscopy

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United States of America Patent

PATENT NO 9069007
APP PUB NO 20130340126A1
SERIAL NO

13903152

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Abstract

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An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

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Patent Owner(s)

Patent OwnerAddress
OXFORD INSTRUMENTS ASYLUM RESEARCH INC6310 HOLLISTER AVE GOLETA CA 93117

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  • 2013 Application Filing Year
  • B82Y Class
  • 1156 Applications Filed
  • 1150 Patents Issued To-Date
  • 99.49 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Proksch, Roger B Santa Barbara, US 11 80

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  • 2 Citation Count
  • B82Y Class
  • 0 % this patent is cited more than
  • 10 Age
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