Methods for obtaining hollow nano-structures

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United States of America Patent

PATENT NO 9067242
APP PUB NO 20130284696A1
SERIAL NO

13978407

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Abstract

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Methods are provided for obtaining hollow nano-structures which include the steps of providing a suspended film starting layer on a support substrate, depositing on the starting layer a sacrificial layer, performing, in progressive sequence, a complete erosion phase of said support substrate and starting layer and performing an at least partial erosion phase of the sacrificial layer previously deposited on the starting layer so as to obtain holes passing through the starting layer and passing or non passing through the sacrificial layer, depositing, on the side of the support substrate opposite to that where the starting layer is put, at least one covering layer arranged to internally cover the holes created by the progressive erosion. Hollow nano-structures formed by such methods are also provided.

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Patent Owner(s)

Patent OwnerAddress
FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIAVIA MOREGO 30 GENOVA 16163

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Angelis Francesco Genova, IT 26 147
Di, Fabrizio Enzo Rome, IT 6 19

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