P and N region differentiation for image-to-CAD alignment
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United States of America Patent
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Jun 23, 2015
Grant Date -
Feb 13, 2014
app pub date -
Aug 7, 2013
filing date -
Aug 8, 2012
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Abstract
In one embodiment, a method for aligning an image of a semiconductor device with a bitmap representation thereof includes receiving diffusion layer information of at least a portion of the semiconductor device, receiving implant layer information of the at least a portion of the semiconductor device, deriving distinct p- and n-doped region information from the received diffusion and implant layer information, generating the bitmap representation, including a differentiation between the distinct p- and n-doped regions, and performing an alignment operation of the image of the semiconductor device with generated bitmap representation.
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