Apparatus and method for examining a specimen by means of probe microscopy
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United States of America Patent
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Jun 23, 2015
Grant Date -
Sep 9, 2010
app pub date -
Aug 20, 2007
filing date -
Aug 18, 2006
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Abstract
The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.
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