Liner-based assembly for removing impurities
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United States of America Patent
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Jun 23, 2015
Grant Date -
Aug 22, 2013
app pub date -
Oct 27, 2011
filing date -
Oct 27, 2010
priority date (Note) -
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Abstract
The present disclosure relates to a liner for storing a material, the liner including at least two layers, wherein a layer that is in contact with the material is an active layer. The active layer may be made active by incorporating a scavenger into the layer. At least one layer of the liner may comprise a polymer or a fluoropolymer. In some embodiments, the active layer may be configured for removing microbridging components in photoresists. In some embodiments, the active layer may be made active by coating the interior of the layer with an inert material, such as glass. In further embodiments, the liner may be positioned within a stainless steel canister. The present disclosure also relates to a liner-based assembly for storing a material, an overpack within which the liner is positioned, and a purifying packet positioned between the liner and the overpack.
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