Methods and apparatus for vertically orienting substrate processing tools in a clean space

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United States of America Patent

PATENT NO 9059227
APP PUB NO 20120214396A1
SERIAL NO

13398371

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Abstract

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The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.

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Patent Owner(s)

Patent OwnerAddress
FUTRFAB INC4 CROTTY LANE NEW WINDSOR NY 12553

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Flitsch, Frederick A New Windsor, US 253 4985

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