Processing of insulators and semiconductors

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United States of America Patent

PATENT NO 9059079
SERIAL NO

14036925

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Abstract

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A method is disclosed for processing an insulator material or a semiconductor material. The method includes pulsing a plasma lamp onto the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a large area region of the material. The method may further include pulsing a laser onto a selected region of the material to diffuse a doping substance into the material, to activate the doping substance in the material or to metallize a selected region of the material.

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Patent Owner(s)

Patent OwnerAddress
UT-BATTELLE LLCONE BETHEL VALLEY ROAD OAK RIDGE TN 37831-6258

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Angelini, Joseph Attilio Henderson, US 1 2
Duty, Chad Edward Knoxville, US 5 26
Jellison,, Jr Gerald Earle Oak Ridge, US 4 11
Joshi, Pooran C Knoxville, US 11 36
Quick, Nathaniel R Lake Mary, US 74 1103

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