PROBE-BASED DATA COLLECTION SYSTEM WITH ADAPTIVE MODE OF PROBING
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United States of America Patent
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Jun 16, 2015
Grant Date -
Jun 18, 2015
app pub date -
Dec 16, 2013
filing date -
Dec 16, 2013
priority date (Note) -
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Abstract
A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample.
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