Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths

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United States of America Patent

PATENT NO 9052494
APP PUB NO 20110242528A1
SERIAL NO

12750488

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Abstract

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An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR TECHNOLOGIES CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hudyma, Russel San Ramon, US 1 0
Hwang, Shiow-Hwei San Ramon, US 13 189
Jeong, Hwan J Los Altos, US 34 679
Kirk, Gregory L Pleasanton, US 40 916
Shafer, David Fairfield, US 84 2554

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