Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths
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United States of America Patent
Stats
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Jun 9, 2015
Grant Date -
Oct 6, 2011
app pub date -
Mar 30, 2010
filing date -
Oct 2, 2007
priority date (Note) -
In Force
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Abstract
An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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KLA-TENCOR TECHNOLOGIES CORPORATION | ONE TECHNOLOGY DRIVE MILPITAS CA 95035 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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Hudyma, Russel | San Ramon, US | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Hwang, Shiow-Hwei | San Ramon, US | 13 | 189 |
# of filed Patents : 13 Total Citations : 189 | |||
Jeong, Hwan J | Los Altos, US | 34 | 679 |
# of filed Patents : 34 Total Citations : 679 | |||
Kirk, Gregory L | Pleasanton, US | 40 | 916 |
# of filed Patents : 40 Total Citations : 916 | |||
Shafer, David | Fairfield, US | 84 | 2554 |
# of filed Patents : 84 Total Citations : 2554 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 9, 2026 |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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Oct 31, 2015 | FEPP | FEE PAYMENT PROCEDURE | free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
Aug 06, 2015 | P | Published | |
Jan 29, 2015 | F | Filing | |
Jan 15, 2015 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HAASE, BJORN;PILZ, STEFAN;REEL/FRAME:034840/0523 Owner name: ENDRESS + HAUSER CONDUCTA GESELLSCHAFT FUER MESS- Effective Date: Jan 15, 2015 |
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