Probe assembly for a scanning probe microscope
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United States of America Patent
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Jun 9, 2015
Grant Date -
Jan 10, 2013
app pub date -
Mar 29, 2011
filing date -
Mar 29, 2010
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Abstract
A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.
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