Inert gas delivery system for electrical inspection apparatus

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United States of America Patent

PATENT NO 9052338
APP PUB NO 20140069165A1
SERIAL NO

14082603

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Abstract

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An apparatus for electrical inspection is disclosed. The apparatus comprises an inert gas delivery system that delivers inert gas near a microscope imaging element and electrical test probes. A gas supply provides an inert gas such as argon or nitrogen. The inert gas displaces oxygen to prevent premature oxidation of the test probes. In one embodiment, one or more delivery tubes deliver inert gas to the measurement area.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONARMONK NY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kane, Terence Lawrence Wappinger Falls, US 8 62
Oldrey, Richard Walter Clintondale, US 3 1
Tenney, Michael P Hopewell Junction, US 16 45

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