Device for measuring the positioning of a microactuator
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United States of America Patent
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Jun 9, 2015
Grant Date -
Jan 31, 2013
app pub date -
Jan 17, 2011
filing date -
Jan 27, 2010
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Abstract
A microtechnique device includes an actuator, designed to move movable equipment with a permanent magnet with respect to a support. The actuator is designed to move the movable equipment in two degrees of freedom from a position of rest, and the permanent magnet is chosen to have a magnetic field distribution that presents a main plane of symmetry and a main direction of magnetization passing through a center. The device includes a first magnetic sensor and a second magnetic sensor, these two being designed to detect a movement of the magnet. The sensors are positioned with respect to the position of rest of the magnet in a specific manner in the main plane of symmetry of the magnetic field and near to extrema. The first and second sensors are then sensitive to the movements of the movable equipment perpendicular to their respective working axes.
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