Pattern forming method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 2, 2015
Grant Date -
Sep 23, 2010
app pub date -
Mar 18, 2010
filing date -
Mar 19, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A pattern forming method includes determining an amount of curable resin to be formed on a substrate, the curable resin having volatility, the amount of the curable resin being determined by a calculation considering volatile loss of the curable resin, the calculation being performed for each of a plurality of regions of the substrate, forming the curable resin having the determined amount on the substrate, the forming the curable resin being performed for each of the plurality of regions of the substrate, contacting the curable resin formed on the substrate with a template, the template including a pattern to be filled with the curable resin by the contacting, and curing the curable resin under a condition where the curable resin is in contact with the template.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2010 Application Filing Year
- B82Y Class
- 1402 Applications Filed
- 567 Patents Issued To-Date
- 40.45 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 3 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 10 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 2, 2026 |
