Sulfonium salt and photo-acid generator

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United States of America Patent

PATENT NO 9045398
APP PUB NO 20140357896A1
SERIAL NO

14289686

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Abstract

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Provided is a novel sulfonium salt that has high solubility in a solvent and has high light sensitivity to, especially, light having a wavelength not longer than deep-UV (254 nm) and a novel photo-acid generator comprising the sulfonium salt. The invention relates to a sulfonium salt represented by the following general formula (1) and a novel photo-acid generator comprising the sulfonium salt.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTDKAWASAKI-SHI KANAGAWA-KEN
SAN-APRO LTD11 IKKYO NOMOTO-CHO HIGASHIYAMA-KU KYOTO-SHI KYOTO 605-0995

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuta, Takeshi Kyoto, JP 23 150
Hato, Toshiaki Kawasaki, JP 9 144
Ikeda, Takuya Kyoto, JP 103 311
Kaiho, Takaaki Kawasaki, JP 15 84
Komuro, Yoshitaka Kawasaki, JP 50 303
Suzuki, Issei Kyoto, JP 71 641
Takashima, Yusaku Kyoto, JP 5 19
Utsumi, Yoshiyuki Kawasaki, JP 88 732

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