Method for detaching a semiconductor chip from a foil
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United States of America Patent
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May 26, 2015
Grant Date -
Oct 3, 2013
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Mar 15, 2013
filing date -
Mar 30, 2012
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Abstract
A method for detaching a semiconductor chip from a foil uses a die ejector comprising plates having a straight supporting edge and an L-shaped supporting edge comprises:
- lifting of the plates to a height H1 above the surface of a cover plate;lowering of a first pair of plates with L-shaped supporting edge;optionally, lowering of a second pair of plates with L-shaped supporting edge;lifting of the plates that have not yet been lowered to a height H2>H1;staggered lowering of plates that have not yet been lowered, with at least one or several plates not being lowered;optionally, lowering of the plates that have not yet been lowered to a height H3
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Patent Owner Address BESI SWITZERLAND AG HINTERBERGSTRASSE 32A CHAM 6330
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# of filed Patents
Total Citations
Barmettler, Ernst
Emmenbrucke, CH
2
5
Hurschler, Fabian
Lucerne, CH
3
4
Pulis, Brian
Knonau, CH
3
4
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US Patent No: 9039867
Method for detaching a semiconductor chip from a foil
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First Claim
Family

Patent Owner(s)
Patent Owner | Address | |
---|---|---|
BESI SWITZERLAND AG | HINTERBERGSTRASSE 32A CHAM 6330 |
International Classification(s)

Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Barmettler, Ernst | Emmenbrucke, CH | 2 | 5 |
Hurschler, Fabian | Lucerne, CH | 3 | 4 |
Pulis, Brian | Knonau, CH | 3 | 4 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 26, 2026 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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