Silicone rubber material for soft lithography
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United States of America Patent
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May 26, 2015
Grant Date -
Apr 28, 2011
app pub date -
May 29, 2009
filing date -
Jun 6, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention relates to a silicone rubber like material and a printing device including a stamp layer (100;201) comprising such a material. The material is suitable for use in soft lithography as it enables stable features having dimensions in the nanometer range to be obtained on a substrate, and also allows for the accommodation onto rough and non-flat substrate surfaces. The invention also relates to methods for manufacturing the silicone rubber like material and stamp layer (100;201) and use thereof in lithographic processes.
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International Classification(s)
- B41N:PRINTING PLATES OR FOILS
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- C08G:MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN B....
- B41C:PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF P....
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
- C08L:COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
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