Silicon acousto-optic modulator structure and method
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United States of America Patent
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May 19, 2015
Grant Date -
Nov 22, 2012
app pub date -
Jul 24, 2012
filing date -
Jan 26, 2010
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Abstract
An electro-optic structure, which may comprise an acousto-optic modulator for use in an opto-acoustic oscillator, comprises a plurality of rigidly connected resonator core components located movably separated over a substrate and anchored to the substrate at an anchor point. An actuator electrode is located separated from a first one of the rigidly connected resonator core components and an optical waveguide is located separated from a second one of the rigidly connected resonator core components. Radio frequency and direct current actuation of the actuator electrode provides a mechanical vibration in the first rigidly connected resonator core component that is mechanically coupled to the second rigidly connected resonator core component which serves to optically modulate light transported through the wave guide. Reverse operation is also contemplated. Embodiments also contemplate a third rigidly connected resonator core component as a radiation pressure driven detector. Further contemplated are related fabrication and operation methods.
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