Six-axis four-subdividing interferometer
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United States of America Patent
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May 19, 2015
Grant Date -
May 8, 2014
app pub date -
Jan 10, 2014
filing date -
Jul 22, 2011
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Abstract
Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.
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