Control module for an ion implanter
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United States of America Patent
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May 19, 2015
Grant Date -
Dec 4, 2014
app pub date -
Oct 3, 2012
filing date -
Oct 4, 2011
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Abstract
A control module for an ion implanter having a power supply, the power supply comprising: an electricity generator HT having its positive pole connected to ground; a first switch SW1 having its first pole connected to the negative pole of the generator HT and having its second pole connected to the outlet terminal S of the power supply; and a second switch SW2 having its first pole connected to the outlet terminal S and having its second pole connected to a neutralization terminal N. The control module also comprises a current measurement circuit AMP for measuring the current that flows between the second pole of the second switch SW2 and the neutralization terminal N.
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