Microelectromechanical load sensor and methods of manufacturing the same

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United States of America Patent

PATENT NO 9032818
APP PUB NO 20140007705A1
SERIAL NO

13934900

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Abstract

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A microelectromechanical (“MEMS”) load sensor device for measuring a force applied by a human user is described herein. In one aspect, the load sensor device has a contact surface in communication with a touch surface which communicates forces originating on the touch surface to a deformable membrane, on which load sensor elements are arranged, such that the load sensor device produces a signal proportional to forces imparted by a human user along the touch surface. In another aspect, the load sensor device has an overload protection ring to protect the load sensor device from excessive forces. In another aspect, the load sensor device has embedded logic circuitry to allow a microcontroller to individually address load sensor devices organized into an array. In another aspect, the load sensor device has electrical and mechanical connectors such as solder bumps designed to minimize cost of final component manufacturing.

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Patent Owner(s)

Patent OwnerAddress
NEXTINPUT INC980 LINDA VISTA AVENUE MOUNTAIN VIEW CA 94043

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Campbell, Ian Smyma, US 51 366
Diestelhorst, Ryan Atlanta, US 28 309

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