Piezoelectric element, liquid discharge head and liquid discharge apparatus

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United States of America Patent

PATENT NO 9022531
APP PUB NO 20130222482A1
SERIAL NO

13770250

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Abstract

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The piezoelectric element includes, on a substrate: a piezoelectric film; and a pair of electrodes provided in contact with the piezoelectric film; in which the piezoelectric film contains a perovskite-type metal oxide represented by the general formula (1) as a main component:

description='In-line Formulae' end='lead'Ax(ZnjTi(1-j))l(MgkTi(1-k))mMnO3  General Formula (1)description='In-line Formulae' end='tail'

wherein the perovskite-type metal oxide is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction, of the pair of electrodes, a lower electrode provided on the substrate side is a multilayer electrode including at least a first electrode layer in contact with the substrate and a second electrode layer in contact with the piezoelectric film, and the second electrode layer is a perovskite-type metal oxide electrode which is uniaxially (111)-oriented in pseudo-cubic notation in a thickness direction.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHA30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 1468501 JAPAN
TOKYO INSTITUTE OF TECHNOLOGY12-1 OOKAYAMA 2-CHOME MEGURO-KU TOKYO 152-8550
SOPHIA SCHOOL CORPORATIONTOKYO 102-8554

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funakubo, Hiroshi Yokohama, JP 46 471
Hayashi, Jumpei Chofu, JP 65 394
Kubota, Makoto Yokohama, JP 219 2960
Miura, Kaoru Matsudo, JP 31 193
Nagata, Jun-ichi Yokohama, JP 9 30
Oikawa, Takahiro Yokohama, JP 26 917
Uchida, Hiroshi Tokyo, JP 337 3104
Watanabe, Takayuki Yokohama, JP 316 3383
Yabuta, Hisato Machida, JP 64 18000
Yasui, Shintaro Yokohama, JP 10 29

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