Methods of forming molybdenum sputtering targets
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United States of America Patent
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Apr 28, 2015
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app pub date -
Mar 25, 2013
filing date -
Aug 31, 2004
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Abstract
In various embodiments, planar sputtering targets are produced by forming a billet at least by pressing molybdenum powder in a mold and sintering the pressed powder, working the billet to form a worked billet, heat treating the worked billet, working the worked billet to form a final billet, and heat treating the final billet.
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