Beam guide and method for adjusting the opening angle of a laser beam
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United States of America Patent
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Apr 28, 2015
Grant Date -
Mar 27, 2014
app pub date -
Mar 15, 2013
filing date -
Sep 27, 2012
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Abstract
Beam guides for guiding a laser beam from a driver laser device in the direction of a target position for generating extreme ultraviolet (“EUV”) radiation are disclosed. The beam guides include a device for increasing or decreasing the beam diameter of the laser beam. The device includes a first off-axis parabolic mirror having a first convex curved reflecting surface and a second off-axis parabolic mirror having a second concave curved reflecting surface. The beam guides also include a moving device arranged to change a distance between the first and the second reflecting surfaces to change the opening angle (α), e.g., the convergence or divergence angle, of the laser beam. Methods for adjusting an opening angle (α) of a laser beam using such beam guides are also disclosed.
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