Apparatus and method for supporting a workpiece during processing
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United States of America Patent
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Apr 28, 2015
Grant Date -
Jan 9, 2014
app pub date -
Jul 6, 2012
filing date -
Jul 6, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for supporting a workpiece during processing of the workpiece is disclosed. The apparatus comprises: a chassis having a vacuum chamber that is connectable to a vacuum source; a supporting device rotatable relative to the chassis, the supporting device having a hollow compartment and a supporting surface for holding the workpiece; and at least one sealing device arranged between the chassis and the supporting device, to provide an air-tight seal between the chassis and the supporting device while allowing for rotation of the supporting device with respect to the chassis, so as to form a vacuum passage extending from the supporting surface of the supporting device through the hollow compartment of the supporting device and the vacuum chamber of the chassis to the vacuum source, to thereby hold the workpiece to the supporting surface of the supporting device during processing of the workpiece.
First Claim
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
- B28D:WORKING STONE OR STONE-LIKE MATERIALS
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B25B:TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR,....
- C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....
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