NEMS comprising AlSi alloy based transducer
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United States of America Patent
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Apr 28, 2015
Grant Date -
Nov 1, 2012
app pub date -
Jul 13, 2010
filing date -
Jul 17, 2009
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Abstract
A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.
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