MOSFET and method for manufacturing the same

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United States of America Patent

PATENT NO 9012272
SERIAL NO

13379444

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Abstract

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The present application discloses an MOSFET and a method for manufacturing the same. The MOSFET comprises: a semiconductor substrate; a first insulation buried layer disposed on the semiconductor substrate; a back gate formed in a first semiconductor layer which is disposed on the first insulation buried layer; a second insulation buried layer disposed on the first semiconductor layer; source/drain regions formed in a second semiconductor layer which is disposed on the second insulation buried layer; a gate disposed on the second semiconductor layer; and electric connections to the source/drain regions, the gate and the back gate, wherein the back gate comprises first back gate regions of a first conductivity type which are disposed under the source/drain regions and a second back gate region of a second conductivity type which is disposed under a channel region, the first back gate regions adjoins the second back gate region, the first conductivity type is opposite to the second conductivity type, and the electric connection to the back gate comprise a conductive via contacted with one of the first back gate regions. The MOSFET, of any conductivity type, can have adjustable threshold voltage and reduced leakage current via the back gate between the source/drain regions by using the back gate in the form of a PNP junction or an NPN junction.

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Patent Owner(s)

Patent OwnerAddress
INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD BEIJING 100029

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liang, Qingqing Lagrangeville, US 168 2700
Luo, Zhijiong Poughkeepsie, US 255 4762
Yin, Haizhou Poughkeepsie, US 244 3095
Zhu, Huilong Poughkeepsie, US 705 13304

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