Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
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United States of America Patent
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Apr 14, 2015
Grant Date -
Nov 22, 2012
app pub date -
Apr 26, 2012
filing date -
May 17, 2011
priority date (Note) -
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Abstract
Provided are a waveguide capable of suppressing strain and defect caused in a semiconductor in an initial stage or during operation due to a manufacturing process or the like to realize improvement and stabilization of characteristics such as oscillation characteristics, and a method of manufacturing the waveguide. A waveguide includes a first conductor layer and a second conductor layer that are composed of a negative dielectric constant medium having a negative real part of dielectric constant with respect to an electromagnetic wave in a waveguide mode, and a core layer that is in contact with and placed between the first conductor layer and the second conductor layer, and includes a semiconductor portion. At least the first conductor layer has a particular depressed and projected structure extending in an in-plane direction.
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